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1. Identity statement
Reference TypeConference Paper (Conference Proceedings)
Siteplutao.sid.inpe.br
Holder Codeisadg {BR SPINPE} ibi 8JMKD3MGPCW/3DT298S
Identifier8JMKD3MGP3W/3SCS2T8
Repositorysid.inpe.br/plutao/2018/12.14.19.49
Metadata Repositorysid.inpe.br/plutao/2018/12.14.19.49.30
Metadata Last Update2019:01.14.17.09.18 (UTC) administrator
Labellattes: 9226460532838417 2 SilvaUedaPichReut:2018:DiHoCa
Citation KeySilvaUedaPichReut:2018:DiHoCa
TitleDiagnostics of hollow cathode plasma and sputtered materials ejected from small diameter metallic tubes by 2-D deposition patterns on silicon wafer targets
FormatDVD
Year2018
Access Date2024, May 19
Secondary TypePRE CI
2. Context
Author1 Silva, Carla da
2 Ueda, Mário
3 Pichon, L
4 Reuther, H
Resume Identifier1
2 8JMKD3MGP5W/3C9JHSB
Group1 CSE-ETES-SESPG-INPE-MCTIC-GOV-BR
2 LABAP-COCTE-INPE-MCTIC-GOV-BR
Affiliation1 Instituto Nacional de Pesquisas Espaciais (INPE)
2 Instituto Nacional de Pesquisas Espaciais (INPE)
Author e-Mail Address1 carla.silva@inpe.br
2 mario.ueda@inpe.br
Conference NameE‌urophysics Conference on the Atomic and Molecular Physics of Ionized Gases (ESCAMPIG)
Conference LocationGlasgow, Scotland
Date17-21 July
Pages112
Book TitleProceedings
History (UTC)2018-12-20 17:06:25 :: lattes -> administrator :: 2018
2019-01-04 16:58:51 :: administrator -> simone :: 2018
2019-01-04 17:54:15 :: simone -> administrator :: 2018
2019-01-14 17:09:18 :: administrator -> simone :: 2018
3. Content and structure
Is the master or a copy?is the master
Content Stagecompleted
Transferable1
Content TypeExternal Contribution
KeywordsPlasma Diagnostics
small metallic tubes
Hollow Cathode Plasma
Si wafer
AreaFISPLASMA
Arrangement 1urlib.net > BDMCI > Fonds > Produção anterior à 2021 > LABAP > Diagnostics of hollow...
Arrangement 2urlib.net > BDMCI > Fonds > Produção pgr ATUAIS > CSE > Diagnostics of hollow...
doc Directory Contentthere are no files
source Directory Contentthere are no files
agreement Directory Contentthere are no files
4. Conditions of access and use
Languageen
User Grouplattes
Reader Groupadministrator
lattes
simone
Visibilityshown
Update Permissionnot transferred
5. Allied materials
Next Higher Units8JMKD3MGPCW/3ET2RFS
8JMKD3MGPCW/3F35BSP
Host Collectiondpi.inpe.br/plutao@80/2008/08.19.15.01
6. Notes
Empty Fieldsabstract archivingpolicy archivist callnumber copyholder copyright creatorhistory descriptionlevel dissemination doi e-mailaddress edition editor isbn issn lineage mark mirrorrepository nextedition notes numberoffiles numberofvolumes orcid organization parameterlist parentrepositories previousedition previouslowerunit progress project publisher publisheraddress readpermission rightsholder schedulinginformation secondarydate secondarykey secondarymark serieseditor session shorttitle size sponsor subject targetfile tertiarymark tertiarytype type url versiontype volume
7. Description control
e-Mail (login)simone
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